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Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA / edited by David F. Kyser ... [et al.] ; managing editor, Daniel Halibey

データ種別	図書
出版者	AMF O'Hare [Chicago], IL : Scanning Electron Microscopy, Inc.
出版年	c1984
大きさ	xii, 372 p. : ill. ; 29 cm
一般注記	Includes bibliographies and indexes
著者標目	*Pfefferkorn Conference Kyser, David F.
件　名	LCSH:Solids -- Effect of radiation on -- Congresses  全ての件名で検索 LCSH:Electron beams -- Congresses  全ての件名で検索 LCSH:Electrons -- Scattering -- Congresses  全ての件名で検索 LCSH:Backscattering -- Congresses  全ての件名で検索 LCSH:Microlithography -- Congresses  全ての件名で検索 LCSH:Electron energy loss spectroscopy -- Congresses  全ての件名で検索
分　類	LCC:QC176.8.R3 DC19:530.4/1 UDC:621
書誌ID	1000123784
ISBN	0931288304
NCID	BA06299513

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