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RT Book, Whole SR Print DC OPAC T1 Semiconductor processing : a symposium / sponsored by ASTM Committee F-1 on Electronics ... [et al.], San Jose, CA, 7-10 Feb., 1984 ; D.C. Gupta, editor T2 ASTM special technical publication A1 Gupta, D. C. (Dinesh C.) A1 ASTM Committee F-1 on Electronics A1 Symposium on Semiconductor Processing YR 1984 FD c1984 SP 671 p. K1 Semiconductor industry -- Congresses PB ASTM PP Philadelphia, PA SN 0803104030 LA English (英語) CL LCC:TK7871.85 CL DC19:621.3815/2 CL UDC:621 NO "ASTM publication code number (PCN) 04-850000-46." NO Includes bibliographies and index NO 書誌ID=1000124773; NCID=BA04324278; LK [OPAC]https://library-documents.jaea.go.jp/opac/opac_link/bibid/1000124773 OL 30