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RT Magazine Article SR Print DC OPAC T1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. SECOND SERIES. B, MICROELECTRONICS AND NANOMETER STRUCTURES, PROCESSING, MEASUREMENT AND PHENOMENA YR 1991 FD 1991- VO Vol. 9, no. 1 (Jan./Feb. 1991)- PB American Institute of Physics PP New York SN 21662746 LA English (英語) NO 書誌ID=2000019361; NCID=AA10804928; LK [OPAC]https://library-documents.jaea.go.jp/opac/opac_link/bibid/2000019361 OL 30